JPH0341897B2 - - Google Patents

Info

Publication number

JPH0341897B2

JPH0341897B2 JP19319784A JP19319784A JPH0341897B2 JP H0341897 B2 JPH0341897 B2 JP H0341897B2 JP 19319784 A JP19319784 A JP 19319784A JP 19319784 A JP19319784 A JP 19319784A JP H0341897 B2 JPH0341897 B2 JP H0341897B2

Authority

JP

Japan

Prior art keywords

magnetic

tape

thin film

magnetic recording

recording medium

Prior art date

1984-09-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

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• 230000005291 magnetic effect Effects 0.000 claims description 84
• 239000010409 thin film Substances 0.000 claims description 28
• 239000002184 metal Substances 0.000 claims description 22
• 229910052751 metal Inorganic materials 0.000 claims description 22
• 238000000034 method Methods 0.000 claims description 17
• 238000007740 vapor deposition Methods 0.000 claims description 13
• 238000004519 manufacturing process Methods 0.000 claims description 12
• 230000015572 biosynthetic process Effects 0.000 claims description 10
• 230000008021 deposition Effects 0.000 claims description 4
• 238000001704 evaporation Methods 0.000 description 15
• 230000008020 evaporation Effects 0.000 description 13
• 239000010408 film Substances 0.000 description 12
• 238000010438 heat treatment Methods 0.000 description 9
• -1 Co-P Inorganic materials 0.000 description 8
• 238000006243 chemical reaction Methods 0.000 description 8
• 238000001816 cooling Methods 0.000 description 8
• 239000007769 metal material Substances 0.000 description 7
• 238000010894 electron beam technology Methods 0.000 description 6
• XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
• 239000000758 substrate Substances 0.000 description 6
• 230000005294 ferromagnetic effect Effects 0.000 description 5
• 239000000696 magnetic material Substances 0.000 description 5
• PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
• 235000014113 dietary fatty acids Nutrition 0.000 description 4
• 239000000194 fatty acid Substances 0.000 description 4
• 229930195729 fatty acid Natural products 0.000 description 4
• 229920000139 polyethylene terephthalate Polymers 0.000 description 4
• 239000005020 polyethylene terephthalate Substances 0.000 description 4
• 229910018104 Ni-P Inorganic materials 0.000 description 3
• 229910018487 Ni—Cr Inorganic materials 0.000 description 3
• 229910018536 Ni—P Inorganic materials 0.000 description 3
• 229910045601 alloy Inorganic materials 0.000 description 3
• 239000000956 alloy Substances 0.000 description 3
• 229910001566 austenite Inorganic materials 0.000 description 3
• 125000004432 carbon atom Chemical group C* 0.000 description 3
• 238000000151 deposition Methods 0.000 description 3
• 150000004665 fatty acids Chemical class 0.000 description 3
• 229910010272 inorganic material Inorganic materials 0.000 description 3
• 239000011147 inorganic material Substances 0.000 description 3
• 239000000463 material Substances 0.000 description 3
• 229910052759 nickel Inorganic materials 0.000 description 3
• 239000011368 organic material Substances 0.000 description 3
• 229920001721 polyimide Polymers 0.000 description 3
• PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
• 239000011230 binding agent Substances 0.000 description 2
• 229910052799 carbon Inorganic materials 0.000 description 2
• 150000001875 compounds Chemical class 0.000 description 2
• 239000004744 fabric Substances 0.000 description 2
• 229910052742 iron Inorganic materials 0.000 description 2
• 239000000314 lubricant Substances 0.000 description 2
• 239000006247 magnetic powder Substances 0.000 description 2
• 229910052760 oxygen Inorganic materials 0.000 description 2
• 229920002545 silicone oil Polymers 0.000 description 2
• 238000001771 vacuum deposition Methods 0.000 description 2
• 238000007738 vacuum evaporation Methods 0.000 description 2
• 229910000838 Al alloy Inorganic materials 0.000 description 1
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
• 229920002284 Cellulose triacetate Polymers 0.000 description 1
• 229910020632 Co Mn Inorganic materials 0.000 description 1
• 229910020630 Co Ni Inorganic materials 0.000 description 1
• 229910020637 Co-Cu Inorganic materials 0.000 description 1
• 229910002441 CoNi Inorganic materials 0.000 description 1
• 229910002440 Co–Ni Inorganic materials 0.000 description 1
• 229910020678 Co—Mn Inorganic materials 0.000 description 1
• 229910020707 Co—Pt Inorganic materials 0.000 description 1
• 229910020711 Co—Si Inorganic materials 0.000 description 1
• 229910020514 Co—Y Inorganic materials 0.000 description 1
• LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
• 229910017061 Fe Co Inorganic materials 0.000 description 1
• 229910017060 Fe Cr Inorganic materials 0.000 description 1
• 229910002544 Fe-Cr Inorganic materials 0.000 description 1
• 229910017082 Fe-Si Inorganic materials 0.000 description 1
• 229910002549 Fe–Cu Inorganic materials 0.000 description 1
• 229910017133 Fe—Si Inorganic materials 0.000 description 1
• 229910052688 Gadolinium Inorganic materials 0.000 description 1
• 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
• 229910018657 Mn—Al Inorganic materials 0.000 description 1
• 229910018054 Ni-Cu Inorganic materials 0.000 description 1
• 229910018481 Ni—Cu Inorganic materials 0.000 description 1
• 229910018605 Ni—Zn Inorganic materials 0.000 description 1
• 239000004952 Polyamide Substances 0.000 description 1
• 239000004698 Polyethylene Substances 0.000 description 1
• 239000004642 Polyimide Substances 0.000 description 1
• 239000004734 Polyphenylene sulfide Substances 0.000 description 1
• 229910052777 Praseodymium Inorganic materials 0.000 description 1
• 229910052772 Samarium Inorganic materials 0.000 description 1
• 235000021355 Stearic acid Nutrition 0.000 description 1
• 229910001069 Ti alloy Inorganic materials 0.000 description 1
• NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
• 230000001133 acceleration Effects 0.000 description 1
• LZBCVRCTAYKYHR-UHFFFAOYSA-N acetic acid;chloroethene Chemical compound ClC=C.CC(O)=O LZBCVRCTAYKYHR-UHFFFAOYSA-N 0.000 description 1
• 125000003342 alkenyl group Chemical group 0.000 description 1
• 125000000217 alkyl group Chemical group 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 229910052787 antimony Inorganic materials 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 229910052797 bismuth Inorganic materials 0.000 description 1
• 229910052804 chromium Inorganic materials 0.000 description 1
• UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 description 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1
• 229910017052 cobalt Inorganic materials 0.000 description 1
• 239000010941 cobalt Substances 0.000 description 1
• GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 239000003822 epoxy resin Substances 0.000 description 1
• 239000003302 ferromagnetic material Substances 0.000 description 1
• 239000007789 gas Substances 0.000 description 1
• 229910052737 gold Inorganic materials 0.000 description 1
• 238000007733 ion plating Methods 0.000 description 1
• 229910052746 lanthanum Inorganic materials 0.000 description 1
• 239000010410 layer Substances 0.000 description 1
• 150000002739 metals Chemical class 0.000 description 1
• 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
• 229910052757 nitrogen Inorganic materials 0.000 description 1
• QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
• OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
• 239000003960 organic solvent Substances 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229910052698 phosphorus Inorganic materials 0.000 description 1
• 229920003023 plastic Polymers 0.000 description 1
• 239000004033 plastic Substances 0.000 description 1
• 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
• 229920002647 polyamide Polymers 0.000 description 1
• 229920000515 polycarbonate Polymers 0.000 description 1
• 239000004417 polycarbonate Substances 0.000 description 1
• 229920000647 polyepoxide Polymers 0.000 description 1
• 229920000573 polyethylene Polymers 0.000 description 1
• 239000011112 polyethylene naphthalate Substances 0.000 description 1
• 229920000069 polyphenylene sulfide Polymers 0.000 description 1
• 229920005749 polyurethane resin Polymers 0.000 description 1
• 229920000915 polyvinyl chloride Polymers 0.000 description 1
• 239000004800 polyvinyl chloride Substances 0.000 description 1
• 239000000843 powder Substances 0.000 description 1
• 239000011241 protective layer Substances 0.000 description 1
• 229910052703 rhodium Inorganic materials 0.000 description 1
• 150000003839 salts Chemical class 0.000 description 1
• 229910052709 silver Inorganic materials 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000008117 stearic acid Substances 0.000 description 1
• 229920003048 styrene butadiene rubber Polymers 0.000 description 1
• 238000000427 thin-film deposition Methods 0.000 description 1
• 229910052719 titanium Inorganic materials 0.000 description 1
• 229910052721 tungsten Inorganic materials 0.000 description 1
• 229920006163 vinyl copolymer Polymers 0.000 description 1
• 238000004804 winding Methods 0.000 description 1

Cited By (1)